Journal of Micromechanics and Microengineering latest papers http://stacks.iop.org/0960-1317 Journal of Micromechanics and Microengineering is a leading journal in its field, covering all aspects of microelectromechanichal systems, devices and structures as well as micromechanics, microengineering and microfabrication. The journal publishes key research from around the world and is essential reading for all MEMS researchers. en-gb Copyright © IOP Publishing 2009 Thu, 01 Jan 1970 00:00:00 GMT Thu, 01 Jan 1970 00:00:00 GMT http://syndication.iop.org/about/ custserv@iop.org (Customer Services) Journal of Micromechanics and Microengineering http://images.iop.org/website-logos/ejs_logo.png http://stacks.iop.org/ The 19th MicroMechanics Europe Workshop (MME 2008) http://stacks.iop.org/0960-1317/19/i=7/a=070201?rss=2.0 Author(s): Uwe Schnakenberg<br>Affiliation(s): Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Aachen, Germany Mon, 29 Jun 2009 23:00:00 GMT Selective nucleation in silicon moulds for diamond MEMS fabrication http://stacks.iop.org/0960-1317/19/i=7/a=074015?rss=2.0 Author(s): Alexandre Bongrain, Emmanuel Scorsone, Lionel Rousseau, Gaelle Lissorgues, Celine Gesset, Samuel Saada and Philippe Bergonzo<br>Affiliation(s): CEA, LIST, Diamond Sensors Laboratory, F-91191 Gif-sur-Yette, France; ESIEE, ESYCOM University Paris Est, Cite Descartes, BP99, 93162 Noisy Le Grand, France Mon, 29 Jun 2009 23:00:00 GMT Enhanced UV-assisted vertical etching of polyethylene terephthalate for fabrication of microsystems http://stacks.iop.org/0960-1317/19/i=7/a=074016?rss=2.0 Author(s): A Jahanshahi, H Pajouhi, A H Tamaddon, A Sadeghi, S Mohajerzadeh and B Khadem-Hoseiny<br>Affiliation(s): Nano Electronics and Thin Film Lab, School of Electrical and Computer Engineering, University of Tehran, Tehran, Iran Mon, 29 Jun 2009 23:00:00 GMT Microfabrication of new microelectrode arrays equipped with a ground surface configuration for focal neural microstimulation http://stacks.iop.org/0960-1317/19/i=7/a=074010?rss=2.0 Author(s): L Rousseau, S Joucla, G Lissorgues and B Yvert<br>Affiliation(s): ESIEE-ESYCOM, University Paris Est, France; CNRS, UMR 5228, Bordeaux, F-33000, France; Universite de Bordeaux, UMR 5228, Bordeaux, F-33000, France Mon, 29 Jun 2009 23:00:00 GMT Microbioreactors with microfluidic control and a user-friendly connection to the actuator hardware http://stacks.iop.org/0960-1317/19/i=7/a=074012?rss=2.0 Author(s): A Buchenauer, M Funke, J Buchs, W Mokwa and U Schnakenberg<br>Affiliation(s): Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Aachen, Germany; AVT. Biochemical Engineering, RWTH Aachen University, Aachen, Germany Mon, 29 Jun 2009 23:00:00 GMT Iridium oxide deposited by pulsed dc-sputtering for stimulation electrodes http://stacks.iop.org/0960-1317/19/i=7/a=074009?rss=2.0 Author(s): A van Ooyen, G Topalov, G Ganske, W Mokwa and U Schnakenberg<br>Affiliation(s): Institute of Materials in Electrical Engineering 1 (IWE1), RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany; Institute of Electrochemistry and Energy Systems, Bulgarian Academy of Sciences, 1113 Sofia Mon, 29 Jun 2009 23:00:00 GMT Vertically tapered layers for optical applications fabricated using resist reflow http://stacks.iop.org/0960-1317/19/i=7/a=074014?rss=2.0 Author(s): A Emadi, H Wu, S Grabarnik, G de Graaf and R F Wolffenbuttel<br>Affiliation(s): Delft University of Technology, Faculty of EEMCS, Department of ME/EI, Mekelweg 4, 2628 CD, Delft, The Netherlands Mon, 29 Jun 2009 23:00:00 GMT Catheter-based flexible microcoil RF detectors for internal magnetic resonance imaging http://stacks.iop.org/0960-1317/19/i=7/a=074011?rss=2.0 Author(s): M M Ahmad, R R A Syms, I R Young, B Mathew, W Casperz, S D Taylor-Robinson, C A Wadsworth and W M W Gedroyc<br>Affiliation(s): Optical and Semiconductor Devices Group, EEE Dept., Imperial College London, Exhibition Road, London SW7 2AZ, UK; Department of Radiology, Imperial College NHS Trust, Praed St., Paddington, London W2 1NY, UK; Department of Hepatology, Division of Medicine, Faculty of Medicine, Imperial College London, London W2 1PG, UK Mon, 29 Jun 2009 23:00:00 GMT An out-of-plane rotational platform with in-plane electrostatic combs made by the MetalMUMPs process http://stacks.iop.org/0960-1317/19/i=7/a=074007?rss=2.0 Author(s): Jui-che Tsai, Ren-Jie Lai, Chun-Yi Yin, Dian-Sheng Chen and Po-Fan Yeh<br>Affiliation(s): Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan Mon, 29 Jun 2009 23:00:00 GMT A wide-bandwidth and high-sensitivity robust microgyroscope http://stacks.iop.org/0960-1317/19/i=7/a=074004?rss=2.0 Author(s): Korhan Sahin, Emre Sahin, Said Emre Alper and Tayfun Akin<br>Affiliation(s): Department of Mechanical Engineering, Carnegie Mellon University, Pittsburgh, PA 15213, USA; Department of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey; MEMS Research and Application Center, Middle East Technical University, Ankara, Turkey Mon, 29 Jun 2009 23:00:00 GMT Coded ultrasonic remote control without batteries http://stacks.iop.org/0960-1317/19/i=7/a=074002?rss=2.0 Author(s): C Gerhardy, K Burlage and W K Schomburg<br>Affiliation(s): Konstruktion und Entwicklung von Mikrosystemen (KEmikro), RWTH Aachen University, Steinbachstrasse 53 B, 52074 Aachen, Germany Mon, 29 Jun 2009 23:00:00 GMT A novel capillary-effect-based solder pump structure and its potential application for through-wafer interconnection http://stacks.iop.org/0960-1317/19/i=7/a=074005?rss=2.0 Author(s): Jiebin Gu, W T Pike and W J Karl<br>Affiliation(s): Optical and Semiconductor Devices, EEE, Imperial College London, London SW7 2BT, UK Mon, 29 Jun 2009 23:00:00 GMT Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator http://stacks.iop.org/0960-1317/19/i=7/a=074003?rss=2.0 Author(s): Joshua E-Y Lee, Jize Yan and Ashwin A Seshia<br>Affiliation(s): Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2 1PZ, UK Mon, 29 Jun 2009 23:00:00 GMT Simulation and optimization of a totally free flexible RF MEMS switch http://stacks.iop.org/0960-1317/19/i=7/a=074017?rss=2.0 Author(s): N Lorphelin, R Robin, A S Rollier, S Touati, A Kanciurzewski, O Millet and K Segueni<br>Affiliation(s): DelfMEMS 5 rue Heloise, Haute Borne, 59650 Villeneuve d'Ascq, France; Institut d'Electronique de Microelectronique et de Nanotechnologie, IEMN, Villeneuve d'Acsq, France Mon, 29 Jun 2009 23:00:00 GMT A modular BioMEMS platform for new procedures and experiments in tissue engineering http://stacks.iop.org/0960-1317/19/i=7/a=074013?rss=2.0 Author(s): M Stubenrauch, U Frober, D Voges, C Schilling, M Hoffmann and H Witte<br>Affiliation(s): Ilmenau University of Technology, Institute of Micro- and Nanotechnologies, D-98693 Ilmenau, Germany Mon, 29 Jun 2009 23:00:00 GMT An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology http://stacks.iop.org/0960-1317/19/i=7/a=074001?rss=2.0 Author(s): Edin Sarajlic, Christophe Yamahata, Mauricio Cordero and Hiroyuki Fujita<br>Affiliation(s): Center for International Research on MicroMechatronics (CIRMM), Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan Mon, 29 Jun 2009 23:00:00 GMT Pattern transfer on a vertical cavity sidewall using SU8 http://stacks.iop.org/0960-1317/19/i=7/a=074018?rss=2.0 Author(s): T M Verhaar, J Wei and P M Sarro<br>Affiliation(s): DIMES (Delft Institute of Microsystems and Nanoelectronics), Electronic Components, Technology and Materials Laboratory, Delft University of Technology, Feldmannweg 17, 2628 CT Delft, The Netherlands Mon, 29 Jun 2009 23:00:00 GMT A micro flow sensor from a polymer for gases and liquids http://stacks.iop.org/0960-1317/19/i=7/a=074006?rss=2.0 Author(s): R Ahrens and K Schlote-Holubek<br>Affiliation(s): Forschungszentrum Karlsruhe GmbH, Institute for Microstructure Technology, PO Box 3640, 76021 Karlsruhe, Germany; Forschungszentrum Karlsruhe GmbH, Institute of Data Processing and Electronics, PO Box 3640, 76021 Karlsruhe, Germany Mon, 29 Jun 2009 23:00:00 GMT Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime http://stacks.iop.org/0960-1317/19/i=7/a=074021?rss=2.0 Author(s): L Mol, L A Rocha, E Cretu and R F Wolffenbuttel<br>Affiliation(s): Department MicroElectronis/EI, Faculty EEMCS, Delft University of Technology, Mekelweg 4, 2828 CD Delft, The Netherlands; Department of Industrial Electronics, University of Minho, Campus de Azurem, 4800-058 Guimaraes, Portugal; Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, Canada Mon, 29 Jun 2009 23:00:00 GMT Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording http://stacks.iop.org/0960-1317/19/i=7/a=074008?rss=2.0 Author(s): S Herwik, S Kisban, A A A Aarts, K Seidl, G Girardeau, K Benchenane, M B Zugaro, S I Wiener, O Paul, H P Neves and P Ruther<br>Affiliation(s): Department of Microsystems Engineering (IMTEK), University of Freiburg, Freiburg, Germany; Interuniversity Microelectronics Center (IMEC), Leuven, Belgium; Catholic University of Leuven, ESAT-MICAS, Leuven, Belgium; Laboratoire de Physiologie de la Perception et de l'Action (LPPA), College de France, CNRS, Paris, France Mon, 29 Jun 2009 23:00:00 GMT Characterization of thermal cross-talk in a MEMS-based thermopile detector array http://stacks.iop.org/0960-1317/19/i=7/a=074022?rss=2.0 Author(s): H Wu, S Grabarnik, A Emadi, G de Graaf and R F Wolffenbuttel<br>Affiliation(s): Delft University of Technology, Faculty of EEMCS, Department of ME/EI, Mekelweg 4, 2828 CD Delft, The Netherlands Mon, 29 Jun 2009 23:00:00 GMT Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping http://stacks.iop.org/0960-1317/19/i=7/a=074020?rss=2.0 Author(s): L Mol, L A Rocha, E Cretu and R F Wolffenbuttel<br>Affiliation(s): Faculty EEMCS, Department MicroElectronics/EI, Delft University of Technology, Mekelweg 4, 2828 CD Delft, The Netherlands; Department of Industrial Electronics, University of Minho, Campus de Azurem, 4800-058 Guimaraes, Portugal; Department Electrical and Computer Engineering, University of British Columbia, 2332 Main Mall, Vancouver, BC V6T 1Z4, Canada Mon, 29 Jun 2009 23:00:00 GMT Design and measurement of stress indicator structures for the characterization of Epoclad negative photoresist http://stacks.iop.org/0960-1317/19/i=7/a=074019?rss=2.0 Author(s): Kristof Wouters and Robert Puers<br>Affiliation(s): Department Electrotechniek ESAT-MICAS, K.U.Leuven, Kasteelpark Arenberg 10, B-3001 Leuven, Belgium Mon, 29 Jun 2009 23:00:00 GMT