Journal of Micromechanics and Microengineering latest papers http://stacks.iop.org/0960-1317 Journal of Micromechanics and Microengineering is a leading journal in its field, covering all aspects of microelectromechanichal systems, devices and structures as well as micromechanics, microengineering and microfabrication. The journal publishes key research from around the world and is essential reading for all MEMS researchers. en-gb Copyright © IOP Publishing 2009 Thu, 01 Jan 1970 00:00:00 GMT Thu, 01 Jan 1970 00:00:00 GMT http://syndication.iop.org/about/ custserv@iop.org (Customer Services) Journal of Micromechanics and Microengineering http://images.iop.org/website-logos/ejs_logo.png http://stacks.iop.org/ Platinum microheater integrated silicon optical bench assembly for endoscopic optical coherence tomography http://stacks.iop.org/0960-1317/20/i=1/a=015008?rss=2.0 Author(s): Y Xu, M F Wang, C S Premachandran, K W S Chen, N Chen and M Olivo<br>Affiliation(s): Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore 117685; Division of Bioengineering, National University of Singapore, 21 Lower Kent Ridge Road, Singapore 119077; National Cancer Centre Singapore, 11 Hospital Drive, Singapore 169610; Singapore Bioimaging Consortium, Biomedical Sciences Institutes, 11 Biopolis Way, #02-02 Helios, Singapore 138667; School of Physics, National University of Ireland, Galway, University Road, Galway, Ireland Fri, 20 Nov 2009 00:00:00 GMT Thermo-curable epoxy systems for nanoimprint lithography http://stacks.iop.org/0960-1317/20/i=1/a=015006?rss=2.0 Author(s): Chun-Chang Wu and Steve Lien-Chung Hsu<br>Affiliation(s): Department of Materials Science & Engineering, Center for Micro/Nano Science and Technology, National Cheng-Kung University, Tainan, 701-01, Taiwan, Republic of China Fri, 20 Nov 2009 00:00:00 GMT Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms http://stacks.iop.org/0960-1317/20/i=1/a=015007?rss=2.0 Author(s): M Olfatnia, T Xu, L S Ong, J M Miao and Z H Wang<br>Affiliation(s): School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798 Fri, 20 Nov 2009 00:00:00 GMT Thermoplastic microcantilevers fabricated by nanoimprint lithography http://stacks.iop.org/0960-1317/20/i=1/a=015009?rss=2.0 Author(s): Anders Greve, Stephan Keller, Asger L Vig, Anders Kristensen, David Larsson, Kresten Yvind, Jorn M Hvam, Marta Cerruti, Arunava Majumdar and Anja Boisen<br>Affiliation(s): DTU Nanotech, Department of Micro and Nanotechnology, Technical University of Denmark, bldg. 345 east, DK-2800 Kgs. Lyngby, Denmark; DTU Fotonik, Department of Photonics Engineering, Technical University of Denmark, bldg. 343, DK-2800 Kgs Lyngby, Denmark; Department of Mechanical Engineering, University of California at Berkeley, 5131 Etcheverry Hall, Mailstop 1740, Berkeley, CA 94720, USA Fri, 20 Nov 2009 00:00:00 GMT The fabrication of all-silicon micro gas chromatography columns using gold diffusion eutectic bonding http://stacks.iop.org/0960-1317/20/i=1/a=015002?rss=2.0 Author(s): A D Radadia, A Salehi-Khojin, R I Masel and M A Shannon<br>Affiliation(s): Department of Chemical and Biomolecular Engineering, University Of Illinois at Urbana Champaign, IL 61801, USA; Department of Mechanical Science and Engineering, University Of Illinois at Urbana Champaign, IL 61801, USA Wed, 18 Nov 2009 00:00:00 GMT Development of a flexure-based, force-sensing microgripper for micro-object manipulation http://stacks.iop.org/0960-1317/20/i=1/a=015001?rss=2.0 Author(s): Kaushik Jayaram and Suhas S Joshi<br>Affiliation(s): Department of Mechanical Engineering, Indian Institute of Technology Bombay, India Wed, 18 Nov 2009 00:00:00 GMT A novel single-use SU-8 microvalve for pressure-driven microfluidic applications http://stacks.iop.org/0960-1317/20/i=1/a=015005?rss=2.0 Author(s): J Miguel Moreno and Jose M Quero<br>Affiliation(s): Escuela Superior de Ingenieros, University of Seville, Seville, Spain Wed, 18 Nov 2009 00:00:00 GMT Femtosecond laser micromachining of silicon with an external electric field http://stacks.iop.org/0960-1317/20/i=1/a=017001?rss=2.0 Author(s): H Y Zheng and Z W Jiang<br>Affiliation(s): Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075; School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798 Wed, 18 Nov 2009 00:00:00 GMT Tunable photonic crystals on a freestanding polymer membrane http://stacks.iop.org/0960-1317/20/i=1/a=015003?rss=2.0 Author(s): Yongjin Wang, Wolfgang Monch, Bernd Aatz and Hans Zappe<br>Affiliation(s): Department of Nanomechanics, Tohoku University, Sendai 980-8579, Japan; Laboratory for Micro-optics, Department of Microsystems Engineering-IMTEK, University of Freiburg, Freiburg 79110, Germany Wed, 18 Nov 2009 00:00:00 GMT A surface micromachined offset-drive method to extend the electrostatic travel range http://stacks.iop.org/0960-1317/20/i=1/a=015004?rss=2.0 Author(s): J Su, H Yang, P Fay, W Porod and G H Bernstein<br>Affiliation(s): Center for Nano Science and Technology, University of Notre Dame, Notre Dame, IN 46556, USA Wed, 18 Nov 2009 00:00:00 GMT