Journal of Micromechanics and Microengineering latest papers http://stacks.iop.org/0960-1317 Journal of Micromechanics and Microengineering is a leading journal in its field, covering all aspects of microelectromechanichal systems, devices and structures as well as micromechanics, microengineering and microfabrication. The journal publishes key research from around the world and is essential reading for all MEMS researchers. en-gb Copyright © IOP Publishing 2009 Thu, 01 Jan 1970 00:00:00 GMT Thu, 01 Jan 1970 00:00:00 GMT http://syndication.iop.org/about/ custserv@iop.org (Customer Services) Journal of Micromechanics and Microengineering http://images.iop.org/website-logos/ejs_logo.png http://stacks.iop.org/ High-throughput microparticle separation using gradient traveling wave dielectrophoresis http://stacks.iop.org/0960-1317/19/i=12/a=125014?rss=2.0 Author(s): Eunpyo Choi, Byungkyu Kim and Jungyul Park<br>Affiliation(s): Mechanical Engineering, Sogang University, Sinsu-dong, Mapo-gu, Seoul 121-742, Korea; School of Aerospace and Mechanical Engineering, Korea Aerospace University, Goyang, Gyeonggi-do 412-791, Korea Thu, 05 Nov 2009 00:00:00 GMT A MEMS-based silicon micropump with intersecting channels and integrated hotwires http://stacks.iop.org/0960-1317/19/i=12/a=125016?rss=2.0 Author(s): Van Thanh Dau, Thien Xuan Dinh and Susumu Sugiyama<br>Affiliation(s): Graduate School of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu City, Shiga Prefecture, 525-8577, Japan; Ritsumeikan Global Innovation Research Organization, Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu City, Shiga Prefecture, 525-8577, Japan Thu, 05 Nov 2009 00:00:00 GMT Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes http://stacks.iop.org/0960-1317/19/i=12/a=125015?rss=2.0 Author(s): J Cui, X Z Chi, H T Ding, L T Lin, Z C Yang and G Z Yan<br>Affiliation(s): National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, People's Republic of China Thu, 05 Nov 2009 00:00:00 GMT Experimental and numerical analyses of micro rotary shaft pumps http://stacks.iop.org/0960-1317/19/i=12/a=125013?rss=2.0 Author(s): A Rossetti, G Pavesi and G Ardizzon<br>Affiliation(s): Department of Mechanical Engineering, University of Padova, via Venezia 1, 35131 Padova, Italy Thu, 05 Nov 2009 00:00:00 GMT Fabrication of an eyeball-like spherical micro-lens array using extrusion for optical fiber coupling http://stacks.iop.org/0960-1317/19/i=12/a=125017?rss=2.0 Author(s): S C Shen, C T Pan, K H Liu, C H Chao and J C Huang<br>Affiliation(s): Department of Systems and Naval Mechatronic Engineering, National Cheng Kung University, Tainan 701, Taiwan, Republic of China; Department of Mechanical and Electro-Mechanical Engineering, and Center for Nanoscience & Nanotechnology, National Sun Yat-Sen University, Kaoshiung 804, Taiwan, Republic of China; Department of Mechanical Engineering R.O.C. Military Academy, Kaoshiung, Taiwan, Republic of China; Author to whom any correspondence should be addressed Thu, 05 Nov 2009 00:00:00 GMT A novel symmetrical microwave power sensor based on GaAs monolithic microwave integrated circuit technology http://stacks.iop.org/0960-1317/19/i=12/a=125012?rss=2.0 Author(s): De-bo Wang and Xiao-ping Liao<br>Affiliation(s): Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, People's Republic of China Wed, 21 Oct 2009 23:00:00 GMT Vibration analysis of a piezoelectric micromachined modal gyroscope (PMMG) http://stacks.iop.org/0960-1317/19/i=12/a=125008?rss=2.0 Author(s): Xiaosheng Wu, Wenyuan Chen, Yipeng Lu, Qijun Xiao, Gaoyin Ma, Weiping Zhang and Feng Cui<br>Affiliation(s): Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, People's Republic of China Wed, 21 Oct 2009 23:00:00 GMT Three-dimensional micro structured nanocomposite beams by microfluidic infiltration http://stacks.iop.org/0960-1317/19/i=12/a=125009?rss=2.0 Author(s): L L Lebel, B Aissa, O A Paez, M A El Khakani and D Therriault<br>Affiliation(s): Center for Applied Research on Polymers (CREPEC) Mechanical Engineering Department, Ecole Polytechnique de Montreal, PO Box 6079, Station 'Centre-Ville', Montreal, H3C 3A7, Canada; Institut National de la Recherche Scientifique, INRS-Energie, Materiaux et Telecommunications, 1650 Lionel-Boulet Blvd, Varennes, QC, J3X 1S2, Canada Wed, 21 Oct 2009 23:00:00 GMT Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications http://stacks.iop.org/0960-1317/19/i=12/a=125011?rss=2.0 Author(s): M A Gosalvez, B Tang, P Pal, K Sato, Y Kimura and K Ishibashi<br>Affiliation(s): Department of Micro-Nanosystems Engineering, Nagoya University, 464-8603 Aichi, Japan; Research Institute of Electrical Communication, Tohoku University, Japan Wed, 21 Oct 2009 23:00:00 GMT A process of glassy carbon etching without the micro masking effect for the fabrication of a mold with a high-quality surface http://stacks.iop.org/0960-1317/19/i=12/a=125010?rss=2.0 Author(s): Sung-Won Youn, Akihisa Ueno, Masaharu Takahashi and Ryutaro Maeda<br>Affiliation(s): Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan Wed, 21 Oct 2009 23:00:00 GMT